Principles and Applications of NanoMEMS Physics - Hector J. De Los Santos.pdf

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Principles and Applications of NanoMEMS Physics
MICROSYSTEMS
Series Editor
Stephen D. Senturia
Massachusetts Institute of Technology
Editorial Board
Roger T. Howe, University of California, Berkeley
D. Jed Harrison, University of Alberta
Hiroyuki Fujita, University of Tokyo
Jan-Ake Schweitz, Uppsala University
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Principles and Applications
of NanoMEMS Physics
by
H ctor J. De Los Santos
NanoMEMS Research LLC,
Irvine, CA, USA
é
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A C.I.P. Catalogue record for this book is available from the Library of Congress.
ISBN 10 1-4020-3238-2 (HB)
ISBN 13 978-1-4020-3238-7 (HB)
ISBN 10 0-387-25834-5 ( e-book)
ISBN 13 978-0-387-25834-8 (e-book)
Published by Springer,
P.O. Box 17, 3300 AA Dordrecht, The Netherlands.
www.springeronline.com
Printed on acid-free paper
All Rights Reserved
© 2005 Springer
No part of this work may be reproduced, stored in a retrieval system, or transmitted
in any form or by any means, electronic, mechanical, photocopying, microfilming, recording
or otherwise, without written permission from the Publisher, with the exception
of any material supplied specifically for the purpose of being entered
and executed on a computer system, for exclusive use by the purchaser of the work.
Printed in the Netherlands.

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