Fundamentals of Semiconductor Manufacturing and Process Control - G. May, C. Spanos (Wiley, 2006) WW.pdf - Najnowsze ksiazki(48) - walbo48

FUNDAMENTALS OF

SEMICONDUCTOR

MANUFACTURING AND

PROCESS CONTROL

FUNDAMENTALS OF

SEMICONDUCTOR

MANUFACTURING AND

PROCESS CONTROL

Gary S. May, Ph.D.

Georgia Institute of Technology

Atlanta, Georgia

Costas J. Spanos, Ph.D.

University of California at Berkeley

Berkeley, California

A JOHN WILEY & SONS, INC., PUBLICATION

Published by John Wiley & Sons, Inc., Hoboken, New Jersey

Published simultaneously in Canada.

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Library of Congress Cataloging-in-Publication Data:

May, Gary S.

Fundamentals of semiconductor manufacturing and process control / Gary S.

May, Costas J. Spanos.

p. cm.

“Wiley-Interscience.”

Includes bibliographical references and index.

ISBN-13: 978-0-471-78406-7 (cloth : alk. paper)

ISBN-10: 0-471-78406-0 (cloth : alk. paper)

1. Semiconductors — Design and construction. 2. Integrated circuits — Design

and construction. 3. Process control — Statistical methods. I. Spanos, Costas

J. II. Title.

TK7871.85.M379 2006

621.3815 2 — dc22

2005028448

Printed in the United States of America

10987654321

To my children,

Simone and Jordan,

who inspire me.

— Gary S. May

To my family,

for their love and understanding.

— Costas J. Spanos

CONTENTS

Preface

xvii

Acknowledgments

xix

1 Introduction to Semiconductor Manufacturing

Objectives / 1

Introduction / 1

1.1. Historical Evolution / 2

1.1.1. Manufacturing and Quality Control / 3

1.1.2. Semiconductor Processes / 5

1.1.3. Integrated Circuit Manufacturing / 7

1.2. Modern Semiconductor Manufacturing / 8

1.2.1. Unit Processes / 9

1.2.2. Process Sequences / 11

1.2.3. Information Flow / 12

1.2.4. Process Organization / 14

1.3. Goals of Manufacturing / 15

1.3.1. Cost / 15

1.3.2. Quality / 17

1.3.3. Variability / 17

1.3.4. Yield / 17

1.3.5. Reliability / 18

1.4. Manufacturing Systems / 18

1.4.1. Continuous Flow / 19

1.4.1.1. Batch Processes / 20

1.4.1.2. Single Workpiece / 20

1.4.2. Discrete Parts / 21

1.5. Outline for Remainder of the Book / 21

Summary / 22

Problems / 22

References / 23

vii

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