FMEA Guide.pdf

Failure Mode and Effects Analysis (FMEA): A Guide for Continuous

Improvement for the Semiconductor Equipment Industry

SEMATECH

Technology Transfer #92020963B-ENG

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SEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc.

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trademarks or service marks of their respective companies.

Failure Mode and Effects Analysis (FMEA): A Guide for Continuous

Improvement for the Semiconductor Equipment Industry

Technology Transfer #92020963B-ENG

SEMATECH

September 30, 1992

Abstract:

This paper provides guidelines on the use of Failure Mode and Effects Analysis (FMEA) for

ensuring that reliability is designed into typical semiconductor manufacturing equipment. These

are steps taken during the design phase of the equipment life cycle to ensure that reliability

requirements have been properly allocated and that a process for continuous improvement exists.

The guide provides information and examples regarding the proper use of FMEA as it applies to

semiconductor manufacturing equipment. The guide attempts to encourage the use of FMEAs to

cut down cost and avoid the embarrassment of discovering problems (i.e., defects, failures,

downtime, scrap loss) in the field. The FMEA is a proactive approach to solving potential failure

modes. Software for executing an FMEA is available from SEMATECH, Technology Transfer

Number 92091302A-XFR, SEMATECH Failure Modes and Effects Analysis (FMEA) Software

Tool

Keywords:

Failure Modes and Effects Analysis, Reliability, Functional, Risk Priority Number

Authors :

Mario Villacourt

Approvals:

Ashok Kanagal, ETQ&R Department Manager

John Pankratz, Technology Transfer Director

Jeanne Cranford, Technical Information Transfer Team Leader

iii

Table of Contents

1 EXECUTIVE SUMMARY ..................................................................................................... 1

1.1 Description ..................................................................................................................... 1

2 INTRODUCTION ................................................................................................................... 1

2.1 The Use of FMEA in the Semiconductor Industry ........................................................ 1

3 DESIGN OVERVIEW ............................................................................................................ 3

3.1 Purpose of FMEA .......................................................................................................... 3

3.2 When to Perform an FMEA ........................................................................................... 3

3.2.1 Equipment Life Cycle ......................................................................................... 3

3.2.2 Total Quality ....................................................................................................... 3

3.3 Who Performs the FMEA .............................................................................................. 4

3.4 FMEA Process ............................................................................................................... 5

3.4.1 FMEA Prerequisites ............................................................................................ 5

3.4.2 Functional Block Diagram (FBD)....................................................................... 7

3.4.3 Failure Mode Analysis and Preparation of Worksheets...................................... 7

3.4.4 Team Review ................................................................................................... .12

3.4.5 Determine Corrective Action ............................................................................ 12

4 RANKING CRITERIA FOR THE FMEA ............................................................................ 14

4.1 Severity Ranking Criteria ............................................................................................ 14

4.1.1 Environmental, Safety and Health Severity Code............................................ .14

4.1.2 Definitions......................................................................................................... 15

4.2 Occurrence Ranking Criteria ....................................................................................... 15

4.3 Detection Ranking Criteria .......................................................................................... 16

5 FMEA DATA BASE MANAGEMENT SYSTEM (DBMS) ................................................ 16

6 CASE STUDY....................................................................................................................... 17

6.1 Functional Approach Example .................................................................................... 17

7 SUMMARY/CONCLUSIONS.............................................................................................. 21

8 REFERENCES ...................................................................................................................... 21

APPENDIX A

PROCESS – FMEA EXAMPLE ...................................................................... 22

SEMATECH

Technology Transfer #92020963B-ENG

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